Miko Elwenspoek

Universiteit Twente

H-index: 79

Europe-Netherlands

About Miko Elwenspoek

Miko Elwenspoek, With an exceptional h-index of 79 and a recent h-index of 34 (since 2020), a distinguished researcher at Universiteit Twente, specializes in the field of MEMS.

His recent articles reflect a diverse array of research interests and contributions to the field:

Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask

Three-dimensional self-assembly using dipolar interaction

A Thermodynamic Description of Turbulence as a Source of Stochastic Kinetic Energy for 3D Self‐Assembly

Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication

Miko Elwenspoek Information

University	Universiteit Twente
Position	Professor
Citations(all)	26281
Citations(since 2020)	4679
Cited By	16457
hIndex(all)	79
hIndex(since 2020)	34
i10Index(all)	355
i10Index(since 2020)	117
Email	Access Email
University Profile Page	Universiteit Twente
Google Scholar	View Google Scholar Profile