M.J. de Boer (Meint)
Universiteit Twente
H-index: 40
Europe-Netherlands
Top articles of M.J. de Boer (Meint)
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Deep reactive ion etching of cylindrical nanopores in silicon for photonic crystals | Nanotechnology | Melissa J Goodwin Cornelis AM Harteveld Meint J de Boer Willem L Vos | 2023/3/16 |
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD | Micromachines | Henk-Willem Veltkamp Yves L Janssens Meint J de Boer Yiyuan Zhao Remco J Wiegerink | 2022/11/4 |
Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel | 2022/10/13 | ||
Sacrificial grid release technology: A versatile release concept for MEMS structures | Journal of Micromechanics and Microengineering | Y Zhao YL Janssens HW Veltkamp MJ De Boer J Groenesteijn | 2021/3/3 |
Fabrication method for nearly-perfect circular channel structures using Buried Channel Technology and HNA etchant | MNE conference | Qihui Yu Xing An Henk-Willem Veltkamp MJ de Boer RJ Wiegerink | 2021 |
The CORE sequence: A nanoscale fluorocarbon-free silicon plasma etch process based on SF6/O2 cycles with excellent 3D profile control at room temperature | ECS Journal of Solid State Science and Technology | Vy Thi Hoang Nguyen Chantal Silvestre Peixiong Shi Roy Cork Flemming Jensen | 2020/1/7 |
Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific‐Size Au Nanoparticles | Advanced Optical Materials | Zengxing Zhang Thomas Martinsen Guohua Liu Muhammad Tayyib Danfeng Cui | 2020/10 |
Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond | International Journal of Nanotechnology | Dirk Jonker Lucas Kooijman Yasser Pordeli Bernhard Van Der Wel Erwin Berenschot | 2020 |
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology | Micromachines | Yiyuan Zhao Henk-Willem Veltkamp Thomas VP Schut Remco GP Sanders Bogdan Breazu | 2020/5/31 |
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography | Microsystems & Nanoengineering | Shu Ni Erwin JW Berenschot Pieter J Westerik Meint J de Boer René Wolf | 2020/3/23 |
Correction to ‘A biomimetic accelerometer inspired by the cricket's clavate hair’ | Journal of the Royal Society Interface | H Droogendijk MJ de Boer RGP Sanders GJM Krijnen | 2020/11/25 |
Co-Authors
