Dmitry Lopaev (ORCID: 0000-0003-4975-3487)
Moscow State University
H-index: 30
Europe-Russia
Top articles of Dmitry Lopaev (ORCID: 0000-0003-4975-3487)
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Probing surface reactivity in plasmas-is it valid to use a constant reaction probability model? | APS Annual Gaseous Electronics Meeting Abstracts | Jean-Paul Booth Olivier Guaitella Shu Zhang Dmitry Lopaev Sergey Zyryanov | 2023 |
Temperature Effects and Mechanisms of the Action of O, N, and F Atoms on SiOCH Nanoporous Dielectrics | РФФИ | Dmitry V Lopaev Tatyana V Rakhimova Yuri A Mankelevich Ekaterina N Voronina | 2023 |
DC Magnetron Sputtering Plasma: VUV Radiation and Discharge Structure | РФФИ | Alexander F Pal Dmitriy V Lopaev Alexey N Ryabinkin Yuriy A Mankelevich Alexander O Serov | 2023 |
Main Aspects of Metallization Formation in Sub-10 nm Integrated Circuit Manufacturing Technology | РФФИ | Ildar I Amirov Mikhail O Izyumov Aleksander N Kupriyanov Dmitry G Voloshin Dmitry V Lopaev | 2023 |
Oxygen atom and ozone kinetics in the afterglow of a pulse-modulated DC discharge in pure O2: an experimental and modelling study of surface mechanisms and ozone vibrational … | Plasma Sources Science and Technology | Jean-Paul Booth Olivier Guaitella Shu Zhang Dmitry Lopaev S Zyryanov | 2023/9/25 |
Analysis of the Possibility of Independent Control of Various Plasma Parameters of an RF Non-Self-Sustained Plasma Discharge with Additional Ionization by an Electron Beam | РФФИ | Maria A Bogdanova Dmitry V Lopaev Tatyana V Rakhimova Olga V Proshina Alexander T Rakhimov | 2023 |
Sputtering of amorphous Si by low-energy Ar+, Kr+, and Xe+ ions | Journal of Applied Physics | DR Shibanov DV Lopaev SM Zyryanov AI Zotovich KI Maslakov | 2023/8/14 |
N2 PLASMA INTERACTION WITH 2D MoS2: EXPERIMENT AND MODELING | DE Melezhenko SA Khlebnikov AA Solovykh AA Sycheva Yu A Mankelevich | 2023 | |
Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements | Plasma Sources Science and Technology | D Voloshin T Rakhimova A Kropotkin I Amirov M Izyumov | 2023/4/11 |
Effect of H atoms and UV wideband radiation on cured low-k OSG films | Journal of Physics D: Applied Physics | DV Lopaev AI Zotovich SM Zyryanov MA Bogdanova TV Rakhimova | 2022/4/1 |
Dynamics of H atoms surface recombination in low-temperature plasma | Journal of Applied Physics | V Gubarev D Lopaev A Zotovich V Medvedev P Krainov | 2022/11/21 |
Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation | Plasma Sources Science and Technology | M Bogdanova D Lopaev A Zotovich O Proshina T Rakhimova | 2022/8/30 |
Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide | Technical Physics Letters | DE Melezhenko DV Lopaev AI Zotovich EN Voronina | 2022 |
Quenching of O2 (b1Σg+) by O (3P) atoms. Effect of gas temperature | Plasma Sources Science and Technology | Jean-Paul Booth A Chatterjee O Guaitella D Lopaev S Zyryanov | 2022/6/30 |
Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission | ACS Applied Electronic Materials | Alexey I Zotovich Sergey M Zyryanov Dmitry V Lopaev Askar A Rezvanov Ahmed G Attallah | 2022/6/8 |
Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam | Journal of Physics D: Applied Physics | AI Zotovich DV Lopaev MA Bogdanova SM Zyryanov AT Rakhimov | 2022/5/23 |
Absolute O atom density measurements by actinometry: comparison to cavity ring-down spectroscopy | APS Annual Gaseous Electronics Meeting Abstracts | Edmond Baratte Andrey Volynets Dmitry Lopaev Cherif Si Moussi Jean-Paul Booth | 2021 |
‘Virtual IED sensor’for df rf CCP discharges | Plasma Sources Science and Technology | M Bogdanova D Lopaev T Rakhimova D Voloshin A Zotovich | 2021/7/8 |
Filling the gaps in our understanding of plasmas in simple diatomic gases-combining a DC plasma in pure O2 with multiple advanced diagnostics for experimental validation of … | Jean-Paul Booth A Chatterjee O Guaitella D Lopaev S Zyryanov | 2021/3/8 | |
Damage to porous SiCOH low-k dielectrics by O, N and F atoms at lowered temperatures | Journal of Physics D: Applied Physics | DV Lopaev SM Zyryanov AI Zotovich TV Rakhimova Yu A Mankelevich | 2020/2/24 |
Co-Authors
