A I. Zotovich
Moscow State University
H-index: 11
Europe-Russia
Top articles of A I. Zotovich
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Publisher's Note:“Dynamics of H atoms surface recombination in low-temperature plasma”[J. Appl. Phys. 132, 193301 (2022)] | Journal of Applied Physics | V Gubarev D Lopaev A Zotovich V Medvedev P Krainov | 2023/1/14 |
N2 PLASMA INTERACTION WITH 2D MoS2: EXPERIMENT AND MODELING | DE Melezhenko SA Khlebnikov AA Solovykh AA Sycheva Yu A Mankelevich | 2023 | |
Sputtering of amorphous Si by low-energy Ar+, Kr+, and Xe+ ions | Journal of Applied Physics | DR Shibanov DV Lopaev SM Zyryanov AI Zotovich KI Maslakov | 2023/8/14 |
Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements | Plasma Sources Science and Technology | D Voloshin T Rakhimova A Kropotkin I Amirov M Izyumov | 2023/4/11 |
Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam | Journal of Physics D: Applied Physics | AI Zotovich DV Lopaev MA Bogdanova SM Zyryanov AT Rakhimov | 2022/5/23 |
Effect of H atoms and UV wideband radiation on cured low-k OSG films | Journal of Physics D: Applied Physics | DV Lopaev AI Zotovich SM Zyryanov MA Bogdanova TV Rakhimova | 2022/4/1 |
Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide | Technical Physics Letters | DE Melezhenko DV Lopaev AI Zotovich EN Voronina | 2022 |
Dynamics of H atoms surface recombination in low-temperature plasma | Journal of Applied Physics | V Gubarev D Lopaev A Zotovich V Medvedev P Krainov | 2022/11/21 |
Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation | Plasma Sources Science and Technology | M Bogdanova D Lopaev A Zotovich O Proshina T Rakhimova | 2022/8/30 |
Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission | ACS Applied Electronic Materials | Alexey I Zotovich Sergey M Zyryanov Dmitry V Lopaev Askar A Rezvanov Ahmed G Attallah | 2022/6/8 |
‘Virtual IED sensor’for df rf CCP discharges | Plasma Sources Science and Technology | M Bogdanova D Lopaev T Rakhimova D Voloshin A Zotovich | 2021/7/8 |
Electron energy probability function in plasma controlled by high-energy run-away electrons | Plasma Sources Science and Technology | DV Lopaev MA Bogdanova AV Volynets AI Zotovich SM Zyryanov | 2020/2/24 |
Pore sealing mechanism in OSG low‐k films under ion bombardment | Plasma Processes and Polymers | Ekaterina N Voronina Anastasia A Sycheva Dmitry V Lopaev Tatyana V Rakhimova Alexander T Rakhimov | 2020/2 |
Experimental and PIC MCC study of electron cooling—re-heating and plasma density decay in low pressure rf ccp argon afterglow | Plasma Sources Science and Technology | OV Proshina TV Rakhimova AS Kovalev AN Vasilieva AI Zotovich | 2020/1/28 |
Damage to porous SiCOH low-k dielectrics by O, N and F atoms at lowered temperatures | Journal of Physics D: Applied Physics | DV Lopaev SM Zyryanov AI Zotovich TV Rakhimova Yu A Mankelevich | 2020/2/24 |
Co-Authors
