A I. Zotovich

A I. Zotovich

Moscow State University

H-index: 11

Europe-Russia

About A I. Zotovich

A I. Zotovich, With an exceptional h-index of 11 and a recent h-index of 10 (since 2020), a distinguished researcher at Moscow State University, specializes in the field of plasma physics.

His recent articles reflect a diverse array of research interests and contributions to the field:

Publisher's Note:“Dynamics of H atoms surface recombination in low-temperature plasma”[J. Appl. Phys. 132, 193301 (2022)]

N2 PLASMA INTERACTION WITH 2D MoS2: EXPERIMENT AND MODELING

Sputtering of amorphous Si by low-energy Ar+, Kr+, and Xe+ ions

Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements

Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam

Effect of H atoms and UV wideband radiation on cured low-k OSG films

Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide

Dynamics of H atoms surface recombination in low-temperature plasma

A I. Zotovich Information

University

Position

___

Citations(all)

380

Citations(since 2020)

315

Cited By

169

hIndex(all)

11

hIndex(since 2020)

10

i10Index(all)

12

i10Index(since 2020)

10

Email

University Profile Page

Moscow State University

Google Scholar

View Google Scholar Profile

A I. Zotovich Skills & Research Interests

plasma physics

Top articles of A I. Zotovich

Title

Journal

Author(s)

Publication Date

Publisher's Note:“Dynamics of H atoms surface recombination in low-temperature plasma”[J. Appl. Phys. 132, 193301 (2022)]

Journal of Applied Physics

V Gubarev

D Lopaev

A Zotovich

V Medvedev

P Krainov

...

2023/1/14

N2 PLASMA INTERACTION WITH 2D MoS2: EXPERIMENT AND MODELING

DE Melezhenko

SA Khlebnikov

AA Solovykh

AA Sycheva

Yu A Mankelevich

...

2023

Sputtering of amorphous Si by low-energy Ar+, Kr+, and Xe+ ions

Journal of Applied Physics

DR Shibanov

DV Lopaev

SM Zyryanov

AI Zotovich

KI Maslakov

...

2023/8/14

Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurements

Plasma Sources Science and Technology

D Voloshin

T Rakhimova

A Kropotkin

I Amirov

M Izyumov

...

2023/4/11

Experimental study of transition from electron beam to rf-power-controlled plasma in DFCCP in argon with additional ionization by an electron beam

Journal of Physics D: Applied Physics

AI Zotovich

DV Lopaev

MA Bogdanova

SM Zyryanov

AT Rakhimov

2022/5/23

Effect of H atoms and UV wideband radiation on cured low-k OSG films

Journal of Physics D: Applied Physics

DV Lopaev

AI Zotovich

SM Zyryanov

MA Bogdanova

TV Rakhimova

...

2022/4/1

Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide

Technical Physics Letters

DE Melezhenko

DV Lopaev

AI Zotovich

EN Voronina

2022

Dynamics of H atoms surface recombination in low-temperature plasma

Journal of Applied Physics

V Gubarev

D Lopaev

A Zotovich

V Medvedev

P Krainov

...

2022/11/21

Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation

Plasma Sources Science and Technology

M Bogdanova

D Lopaev

A Zotovich

O Proshina

T Rakhimova

...

2022/8/30

Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission

ACS Applied Electronic Materials

Alexey I Zotovich

Sergey M Zyryanov

Dmitry V Lopaev

Askar A Rezvanov

Ahmed G Attallah

...

2022/6/8

‘Virtual IED sensor’for df rf CCP discharges

Plasma Sources Science and Technology

M Bogdanova

D Lopaev

T Rakhimova

D Voloshin

A Zotovich

...

2021/7/8

Electron energy probability function in plasma controlled by high-energy run-away electrons

Plasma Sources Science and Technology

DV Lopaev

MA Bogdanova

AV Volynets

AI Zotovich

SM Zyryanov

2020/2/24

Pore sealing mechanism in OSG low‐k films under ion bombardment

Plasma Processes and Polymers

Ekaterina N Voronina

Anastasia A Sycheva

Dmitry V Lopaev

Tatyana V Rakhimova

Alexander T Rakhimov

...

2020/2

Experimental and PIC MCC study of electron cooling—re-heating and plasma density decay in low pressure rf ccp argon afterglow

Plasma Sources Science and Technology

OV Proshina

TV Rakhimova

AS Kovalev

AN Vasilieva

AI Zotovich

...

2020/1/28

Damage to porous SiCOH low-k dielectrics by O, N and F atoms at lowered temperatures

Journal of Physics D: Applied Physics

DV Lopaev

SM Zyryanov

AI Zotovich

TV Rakhimova

Yu A Mankelevich

...

2020/2/24

See List of Professors in A I. Zotovich University(Moscow State University)

Co-Authors

H-index: 44
Ivo Rangelow Prof. Dr.

Ivo Rangelow Prof. Dr.

Technische Universität Ilmenau

H-index: 35
Konstantin Maslakov (Константин Маслаков)

Konstantin Maslakov (Константин Маслаков)

Moscow State University

H-index: 30
Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Moscow State University

H-index: 9
Vladimir Samara

Vladimir Samara

University of Notre Dame

H-index: 7
Askar Rezvanov

Askar Rezvanov

Moscow Institute of Physics and Technology

H-index: 7
Konstantin Kurchikov

Konstantin Kurchikov

Moscow State University

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