Yuki Shimizu

Yuki Shimizu

Tohoku University

H-index: 29

Asia-Japan

About Yuki Shimizu

Yuki Shimizu, With an exceptional h-index of 29 and a recent h-index of 22 (since 2020), a distinguished researcher at Tohoku University, specializes in the field of Precision Metrology, Precision Engineering.

His recent articles reflect a diverse array of research interests and contributions to the field:

Confocal probe based on the second harmonic generation for measurement of linear and angular displacements

Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction

A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser

A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range

Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors (Nanomanufacturing and Metrology,(2021), 4, 1,(53-66 …

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Yuki Shimizu Information

University

Position

Department of Finemechanics

Citations(all)

3154

Citations(since 2020)

1883

Cited By

1953

hIndex(all)

29

hIndex(since 2020)

22

i10Index(all)

92

i10Index(since 2020)

61

Email

University Profile Page

Tohoku University

Google Scholar

View Google Scholar Profile

Yuki Shimizu Skills & Research Interests

Precision Metrology

Precision Engineering

Top articles of Yuki Shimizu

Title

Journal

Author(s)

Publication Date

Confocal probe based on the second harmonic generation for measurement of linear and angular displacements

Optics Express

Ryo Sato

Yuki Shimizu

Hiroki Shimizu

Hiraku Matsukuma

Wei Gao

2023/3/27

Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction

International Journal of Automation Technology

Lue Quan

Yuki Shimizu

Ryo Sato

Dong Wook Shin

Hiraku Matsukuma

...

2022/9/5

A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser

Applied Sciences

Wijayanti Dwi Astuti

Kuangyi Li

Ryo Sato

Hiraku Matsukuma

Yuki Shimizu

...

2022/5/21

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Sensors

Yifan Hong

Ryo Sato

Yuki Shimizu

Hiraku Matsukuma

Hiroki Shimizu

...

2022/12/6

Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser

Applied Sciences

Ryo Sato

Yuki Shimizu

Hiraku Matsukuma

Wei Gao

2022/5/8

A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range

Sensors

Yifan Hong

Ryo Sato

Yuki Shimizu

Hiraku Matsukuma

Wei Gao

2022/4/14

Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors (Nanomanufacturing and Metrology,(2021), 4, 1,(53-66 …

Nanomanufacturing and Metrology

Hiraku Matsukuma

Keisuke Adachi

Takuma Sugawara

Yuki Shimizu

Wei Gao

...

2022/12

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Sensors

Xin Xiong

Chenguang Yin

Lue Quan

Ryo Sato

Hiraku Matsukuma

...

2022/12/1

A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor

Precision Engineering

Lue Quan

Yuki Shimizu

Xin Xiong

Hiraku Matsukuma

Wei Gao

2021/1/1

Mid-infrared autocollimation for linear motion error measurement

Measurement: Sensors

Hiraku Matsukuma

Kaede Matayoshi

Masashi Nagaoka

Yuki Shimizu

Wei Gao

2021/12/1

Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

Nanomanufacturing and Metrology

Hiraku Matsukuma

Keisuke Adachi

Takuma Sugawara

Yuki Shimizu

Wei Gao

...

2021/3

On-machine diameter measurement of a cylindrical workpiece with a reference artefact

Measurement Science and Technology

Yuki Shimizu

Qiaolin Li

Masami Kogure

Kimitaka Nishimura

Yuki Sato

...

2021/6/29

An absolute surface encoder with a planar scale grating of variable periods

Precision Engineering

Yuki Shimizu

Ryo Ishizuka

Kazuki Mano

Yuri Kanda

Hiraku Matsukuma

...

2021/1/1

Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation

Measurement: Sensors

Yuki Shimizu

Lue Quan

Dong Wook Shin

Hiraku Matsukuma

Wei Gao

2021/12/1

An insight into optical metrology in manufacturing

Yuki Shimizu

Liang-Chia Chen

Dae Wook Kim

Xiuguo Chen

Xinghui Li

...

2021/2/16

Foreword to the Special Issue on Micro-and Nano-Metrology in Japan (II)

Nanomanufacturing and Metrology

Yuki Shimizu

Yasuhiro Mizutani

Masaki Michihata

2021/6

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Sensors

Xin Xiong

Yuki Shimizu

Hiraku Matsukuma

Wei Gao

2021/11/8

Improvement of a Stitching Operation in the Stitching Linear-Scan Method for Measurement of Cylinders in a Small Dimension

Applied Sciences

Qiaolin Li

Yuki Shimizu

Toshiki Saito

Hiraku Matsukuma

Yindi Cai

...

2021/5/20

Optical metrology for precision engineering

Wei Gao

Yuki Shimizu

2021/11/22

An optical frequency domain angle measurement method based on second harmonic generation

Sensors

Wijayanti Dwi Astuti

Hiraku Matsukuma

Masaru Nakao

Kuangyi Li

Yuki Shimizu

...

2021/1/19

See List of Professors in Yuki Shimizu University(Tohoku University)