Silvania F. Pereira

About Silvania F. Pereira

Silvania F. Pereira, With an exceptional h-index of 30 and a recent h-index of 18 (since 2020), a distinguished researcher at Technische Universiteit Delft, specializes in the field of Optics.

His recent articles reflect a diverse array of research interests and contributions to the field:

Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure

Optimal parameter estimation of shaped phase objects

Transversal optical singularity induced precision measurement of step-nanostructures

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Coating layer on samples with roughness: numerical study for coherent Fourier scatterometry

Quantum enhanced non-interferometric quantitative phase imaging

Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples

Optical and Tactile Measurements on SiC Sample Defects

Silvania F. Pereira Information

University

Position

Associate Professor of Applied Physics

Citations(all)

5366

Citations(since 2020)

1370

Cited By

4494

hIndex(all)

30

hIndex(since 2020)

18

i10Index(all)

67

i10Index(since 2020)

37

Email

University Profile Page

Google Scholar

Silvania F. Pereira Skills & Research Interests

Optics

Top articles of Silvania F. Pereira

Title

Journal

Author(s)

Publication Date

Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure

Measurement Science and Technology

Anubhav Paul

Jila Rafighdoost

Xiujie Dou

Silvania F Pereira

2024/4/2

Optimal parameter estimation of shaped phase objects

Physical Review A

Arturo Villegas

Marcello HM Passos

Silvania F Pereira

Juan P Torres

2024/3/21

Transversal optical singularity induced precision measurement of step-nanostructures

Optics Express

Xiujie Dou

Jiakang Zhou

Yuquan Zhang

Changjun Min

SF Pereira

...

2023/9/25

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Bruno Rodriguez

Bruno van der Kolk

Samarth Aggarwal

Naresh Sharma

Daniel van der Plaats

...

2023/6/12

Coating layer on samples with roughness: numerical study for coherent Fourier scatterometry

D Kolenov

SF Pereira

2023/8/10

Quantum enhanced non-interferometric quantitative phase imaging

Light: Science & Applications

Giuseppe Ortolano

Alberto Paniate

Pauline Boucher

Carmine Napoli

Sarika Soman

...

2023/7/11

Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples

IEEE Transactions on Semiconductor Manufacturing

Jila Rafighdoost

Dmytro Kolenov

Silvania F Pereira

2023/11/29

Optical and Tactile Measurements on SiC Sample Defects

Jana Grundmann

Elena Ermilova

Andreas Hertwig

Petr Klapetek

Silvania F Pereira

...

2023

Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings

Applied Optics

Anubhav Paul

Dmytro Kolenov

Thomas Scholte

Silvania F Pereira

2023/10/10

Coherent Fourier scatterometry for particle detection on structured surfaces

EPJ Web of Conferences

Anubhav Paul

Dmytro Kolenov

Silvania F Pereira

2022

Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry

Optics Express

Xiujie Dou

Changjun Min

Yuquan Zhang

SF Pereira

Xiaocong Yuan

2022/8/1

Particle detection enhancement by combining coherent Fourier scatterometry with synthetic optical holography

EPJ Web of Conferences

Haoyang Yin

Dmytro Kolenov

Silvania Pereira

2022

Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

Optics Letters

Haoyang Yin

Dmytro Kolenov

Silvania F Pereira

2022/8/1

Coherent Fourier Scatterometry for defect detection on SiC samples

EPJ Web of Conferences

Jila Rafighdoost

Dmytro Kolenov

Silvania F Pereira

2022

Efficient mid-infrared single-photon detection using superconducting NbTiN nanowires with high time resolution in a Gifford-McMahon cryocooler

Photonics Research

Jin Chang

Johannes WN Los

Ronan Gourgues

Stephan Steinhauer

SN Dorenbos

...

2022/4/1

Diffraction grating parameter retrieval using non-paraxial structured beams in coherent Fourier scatterometry

Journal of Optics

S Soman

SF Pereira

O El Gawhary

2022/2/3

Multi-beam Coherent Fourier Scatterometry

EPJ Web of Conferences

Sarika Soman

Silvania Pereira

2022

Direct detection of polystyrene equivalent nanoparticles with diameter of 21 nm (similar to lambda/19) using coherent Fourier scatterometry (vol 29, pg 16487, 2021)

Optics Express

D Kolenov

IE Zadeh

RC Horsten

SF Pereira

2022/8/1

Determination of steep sidewall angle using polarization-sensitive asymmetric scattering

Measurement Science and Technology

Xiujie Dou

Silvania F Pereira

Changjun Min

Yuquan Zhang

Peiwen Meng

...

2021/5/17

Detecting telecom single photons with 99.5− 2.07+ 0.5% system detection efficiency and high time resolution

APL Photonics

J Chang

JWN Los

JO Tenorio-Pearl

Niels Noordzij

R Gourgues

...

2021/3/1

See List of Professors in Silvania F. Pereira University(Technische Universiteit Delft)

Co-Authors

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