Shuxia Zhang
Henan Polytechnic University
H-index: 14
Asia-China
Top articles of Shuxia Zhang
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Pushing feature size down to 11 nm by hyperbolic metamaterials-based interference photolithography under illumination of UV light source | Applied Physics A | Xuefeng Yang Shuxia Zhang Baoji Wang Xiaolin Cai Xiaohua Li | 2023/2 |
Pushing the feature size down to 11 nm by interference photolithography with hyperbolic metamaterials under conventional UV light source | arXiv preprint arXiv:2209.02383 | Xuefeng Yang Shuxia Zhang Baoji Wang Xiaolin Cai Xiaohua Li | 2022/9/6 |
Projecting uniformity subwavelength pattern by plasmonic lithography with unidirectional surface plasmon coupler | Shuxia Zhang Baoji Wang Xiaolin Cai Qin Wang Weiyang Yu | 2022/2/15 |
