Robert Franz

About Robert Franz

Robert Franz, With an exceptional h-index of 26 and a recent h-index of 19 (since 2020), a distinguished researcher at Montanuniversität Leoben, specializes in the field of cathodic arc plasma, sputtering, HiPIMS, thin films, hard coatings.

His recent articles reflect a diverse array of research interests and contributions to the field:

How Cracks Induced by Straining Influence the Tribological Properties of Mo Films Deposited on Polyimide Substrates

Tuning microstructure and properties of MoNbTaWZr high entropy alloy films by adjusting the parameters in high power impulse magnetron sputtering

Refractory high entropy metal sublattice nitride thin films as diffusion barriers in Cu metallizations

A new design rule for high entropy alloy diffusion barriers in Cu metallization

Synthesis of crystalline silver niobate thin films opening pathways for future process development

Thermal stability of MoNbTaTiW, MoNbTaVW and CrMoNbTaW thin films deposited by high power impulse magnetron sputtering

Superconductivity in medium-and high-entropy alloy thin films: Impact of thickness and external pressure

Synthesis and structure of refractory high entropy alloy thin films based on the MoNbTaW system

Robert Franz Information

University

Position

Austria

Citations(all)

1927

Citations(since 2020)

1056

Cited By

1258

hIndex(all)

26

hIndex(since 2020)

19

i10Index(all)

53

i10Index(since 2020)

38

Email

University Profile Page

Google Scholar

Robert Franz Skills & Research Interests

cathodic arc plasma

sputtering

HiPIMS

thin films

hard coatings

Top articles of Robert Franz

How Cracks Induced by Straining Influence the Tribological Properties of Mo Films Deposited on Polyimide Substrates

Metals

2024/3/1

Robert Franz
Robert Franz

H-Index: 16

Tuning microstructure and properties of MoNbTaWZr high entropy alloy films by adjusting the parameters in high power impulse magnetron sputtering

Thin Solid Films

2023/12/1

Stefan Wurster
Stefan Wurster

H-Index: 11

Robert Franz
Robert Franz

H-Index: 16

Refractory high entropy metal sublattice nitride thin films as diffusion barriers in Cu metallizations

Surface and Coatings Technology

2023/11/25

Stefan Wurster
Stefan Wurster

H-Index: 11

Robert Franz
Robert Franz

H-Index: 16

A new design rule for high entropy alloy diffusion barriers in Cu metallization

Journal of Alloys and Compounds

2023/8/25

Stefan Wurster
Stefan Wurster

H-Index: 11

Robert Franz
Robert Franz

H-Index: 16

Synthesis of crystalline silver niobate thin films opening pathways for future process development

Vacuum

2023/7/1

Christian Mitterer
Christian Mitterer

H-Index: 38

Robert Franz
Robert Franz

H-Index: 16

Thermal stability of MoNbTaTiW, MoNbTaVW and CrMoNbTaW thin films deposited by high power impulse magnetron sputtering

Surface and Coatings Technology

2023/2/15

Robert Franz
Robert Franz

H-Index: 16

Superconductivity in medium-and high-entropy alloy thin films: Impact of thickness and external pressure

Physical Review B

2023/1/17

Robert Franz
Robert Franz

H-Index: 16

Christian Mitterer
Christian Mitterer

H-Index: 38

Synthesis and structure of refractory high entropy alloy thin films based on the MoNbTaW system

Surface and Coatings Technology

2022/6/15

Robert Franz
Robert Franz

H-Index: 16

Tuning the microstructure of MoNbTaWZr high entropy alloy films by adjusting the HiPIMS parameters

2022

Robert Franz
Robert Franz

H-Index: 16

Combined electro-mechanical and tribological behavior of MoN films deposited on thin polyimide foils

2022

Robert Franz
Robert Franz

H-Index: 16

TiN/CrN, TiSiN/CrN and NbN/CrN multilayer coatings deposited in an industrial scale HiPIMS system

2022

Robert Franz
Robert Franz

H-Index: 16

Investigation of MoNbTaW-X (X= Ti, V, Cr, Mn, Hf) refractory high entropy alloy thin films deposited by high power impulse magnetron sputtering

2022

Robert Franz
Robert Franz

H-Index: 16

Microstructure and mechanical properties of TiN/CrN multilayer coatings deposited in an industrial-scale HiPIMS system

2022

Robert Franz
Robert Franz

H-Index: 16

Determination of Cooling Rate and Temperature Gradient during Formation of Cathode Spot Craters in a Vacuum Arc

Crystals

2022/10/19

Tribological investigations of Mo films deposited on thin polyimide substrates

Surface and Coatings Technology

2022/7/25

Robert Franz
Robert Franz

H-Index: 16

Rapid solidification and metastable phase formation during surface modifications of composite Al-Cr cathodes exposed to cathodic arc plasma

Journal of Materials Science & Technology

2021/12/20

Cathode spot behavior in nitrogen and oxygen gaseous atmospheres and concomitant cathode surface modifications

Surface and Coatings Technology

2021/9/15

Mehran Golizadeh
Mehran Golizadeh

H-Index: 2

Robert Franz
Robert Franz

H-Index: 16

High temperature fracture toughness of single-layer CrAlN and CrAlSiN hard coatings

Surface and Coatings Technology

2021/3/15

Peter Hosemann
Peter Hosemann

H-Index: 29

Robert Franz
Robert Franz

H-Index: 16

Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films

Journal of alloys and compounds

2021/1/5

Ao Xia
Ao Xia

H-Index: 3

Robert Franz
Robert Franz

H-Index: 16

Tribological properties of sputter-deposited Mo films on polyimide

2021

Robert Franz
Robert Franz

H-Index: 16

See List of Professors in Robert Franz University(Montanuniversität Leoben)

Co-Authors

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