Prof. Dr. Zhen Zhang

About Prof. Dr. Zhen Zhang

Prof. Dr. Zhen Zhang, With an exceptional h-index of 26 and a recent h-index of 22 (since 2020), a distinguished researcher at Tsinghua University, specializes in the field of Automatic Control, Precision OptoMechatronics, Nanopositioning, Laser Applications, Compliant Mechan.

His recent articles reflect a diverse array of research interests and contributions to the field:

Ultra‐Large Scale Stitchless AFM: Advancing Nanoscale Characterization and Manipulation with Zero Stitching Error and High Throughput

A systematic review of machine learning methods applied to fuel cells in performance evaluation, durability prediction, and application monitoring

Ultralarge-Area Stitchless Scanning Probe Lithography and In Situ Characterization System Using a Compliant Nanomanipulator

Progress in applications of shockwave induced by short pulsed laser on surface processing

High-precision and high-efficiency laser polishing method oriented to large-size ultra-thin mask plate

Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning

Design and tracking control of a large-range reluctance-actuated compliant nano-manipulator

Galvanometer based in-situ imaging and inspection system with variable ranges and resolutions

Prof. Dr. Zhen Zhang Information

University

Position

___

Citations(all)

1734

Citations(since 2020)

1137

Cited By

767

hIndex(all)

26

hIndex(since 2020)

22

i10Index(all)

50

i10Index(since 2020)

41

Email

University Profile Page

Google Scholar

Prof. Dr. Zhen Zhang Skills & Research Interests

Automatic Control

Precision OptoMechatronics

Nanopositioning

Laser Applications

Compliant Mechan

Top articles of Prof. Dr. Zhen Zhang

Title

Journal

Author(s)

Publication Date

Ultra‐Large Scale Stitchless AFM: Advancing Nanoscale Characterization and Manipulation with Zero Stitching Error and High Throughput

Small

Yijie Liu

Xuexuan Li

Yuliang Zhang

Lin Ge

Yingchun Guan

...

2024/1

A systematic review of machine learning methods applied to fuel cells in performance evaluation, durability prediction, and application monitoring

Wuyi Ming

Peiyan Sun

Zhen Zhang

Wenzhe Qiu

Jinguang Du

...

2023/2/12

Ultralarge-Area Stitchless Scanning Probe Lithography and In Situ Characterization System Using a Compliant Nanomanipulator

IEEE/ASME Transactions on Mechatronics

Yijie Liu

Xuexuan Li

Lin Ge

Zhen Zhang

2023/10/25

Progress in applications of shockwave induced by short pulsed laser on surface processing

Zhen Zhang

Wenzhe Qiu

Guojun Zhang

Denghua Liu

Peng Wang

2023/1/1

High-precision and high-efficiency laser polishing method oriented to large-size ultra-thin mask plate

2023/8

Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning

Zhen Zhang

Yijie Liu

Xuexuan Li

Ben Pei

Lin Ge

...

2023/5/2

Design and tracking control of a large-range reluctance-actuated compliant nano-manipulator

Xuexuan Li

Yijie Liu

Zhen Zhang

2023/7

Galvanometer based in-situ imaging and inspection system with variable ranges and resolutions

Yuxuan Cao

Kuai Yang

Zhen Zhang

2023/7

Bubble behavior and its effect on surface integrity in laser-induced plasma micro-machining silicon wafer

Journal of Manufacturing Science and Engineering

Zhen Zhang

Yi Zhang

Denghua Liu

Yanming Zhang

Jiaquan Zhao

...

2022/9/1

Laser machining equipment for grinding semiconductor wafers

2022/3/17

A Compliant Nano-manipulator-based Scanning Probe Lithography System

Yijie Liu

Zhen Zhang

2022/8/8

Effect of assisted transverse magnetic field on distortion behavior of thin-walled components in WEDM process

Chinese Journal of Aeronautics

Yanming Zhang

Guojun Zhang

Zhen Zhang

Yi Zhang

Yu Huang

2022/2/1

A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics

Mechanism and Machine Theory

Haiyang Li

Yijie Liu

Zhipeng Wang

Chuyang Leng

Zhen Zhang

...

2022/8

Fabrication and droplet impact performance of superhydrophobic Ti6Al4V surface by laser induced plasma micro-machining

Applied Surface Science

Zhen Zhang

Denghua Liu

Yi Zhang

Tao Xue

Yu Huang

...

2022/12/15

Preparation of antimicrobial surface for medical devices

2022/1/4

Fabrication of high precision grating patterns with a compliant nanomanipulator-based femtosecond laser direct writing system

Precision Engineering

Mengjia Cui

Wei Yang

Yingchun Guan

Zhen Zhang

2022/11/1

Galvanometer driven optical system for laser dynamic focusing

Optics Express

Liang Yu

Kuai Yang

Zhen Zhang

2023/1/2

Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system

2022

Comparative investigations on machinability and surface integrity of CFRP plate by picosecond laser vs laser induced plasma micro-drilling

Optics & Laser Technology

Peng Wang

Zhen Zhang

Denghua Liu

Wenzhe Qiu

Yi Zhang

...

2022/7/1

Noncontact selective laser transfer printing and assembly of micro-sized semiconductor devices

Yuxuan Cao

Zhen Zhang

2022/11/28

See List of Professors in Prof. Dr. Zhen Zhang University(Tsinghua University)

Co-Authors

academic-engine