Markku Leskela
Helsingin yliopisto
H-index: 114
Europe-Finland
Top articles of Markku Leskela
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | 2024/4/16 | ||
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | 2024/4/9 | ||
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films | ACS Omega | Elisa Atosuo Mikko J Heikkilä Johanna Majlund Leevi Pesonen Miia Mäntymäki | 2024/2/26 |
Synthesis and use of precursors for vapor deposition of tungsten containing thin films | 2023/8/24 | ||
Atomic layer deposition of rhenium containing thin films | 2023/11/21 | ||
Inherent area-selective atomic layer deposition of ZnS | Dalton Transactions | Chao Zhang Marko Vehkamäki Markku Leskelä Mikko Ritala | 2023 |
Synthesis and use of precursors for ald of group va element containing thin films | 2023/3/23 | ||
Atomic layer deposition and etching of transition metal dichalcogenide thin films | 2023/8/10 | ||
Synthesis and use of precursors for ALD of tellurium and selenium thin films | 2023/11/14 | ||
Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films | Advanced Materials Interfaces | Alexander Weiss Jacqueline Goldmann Sakari Kettunen Georgi Popov Tomi Iivonen | 2023/1 |
Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization | Advanced Materials Interfaces | Saba Ghafourisaleh Marko Vehkamäki Anton Vihervaara Chao Zhang Mikko J Heikkilä | 2023/3 |
Synthesis and use of precursors for ald of molybdenum or tungsten containing thin films | 2023/7/20 | ||
Atomic Layer Deposition and Pulsed Chemical Vapor Deposition of SnI2 and CsSnI3 | Chemistry of Materials | Alexander Weiß Mariia Terletskaia Georgi Popov Kenichiro Mizohata Markku Leskelä | 2023/10/4 |
Precursors and methods for atomic layer deposition of transition metal oxides | 2023/1/17 | ||
Vapor deposition of thin films comprising gold | 2023/6/8 | ||
Molecular layer deposition of hybrid silphenylene-based dielectric film | Advanced Composites and Hybrid Materials | Xinzhi Li Marko Vehkamäki Mykhailo Chundak Kenichiro Mizohata Anton Vihervaara | 2023/10 |
Atomic Layer Deposition of Boron-Doped Al | Xinzhi Li Marko Vehkamäki Mykhailo Chundak Kenichiro Mizohata Anton Vihervaara | 2023 | |
Methods for filling a gap feature on a substrate surface and related semiconductor structures | 2019/2/28 | ||
Area selective organic material removal | 2023/9/28 | ||
Atomic layer deposition of CoF 2, NiF 2 and HoF 3 thin films | Dalton Transactions | Elisa Atosuo Miia Mäntymäki Leevi Pesonen Kenichiro Mizohata Timo Hatanpää | 2023 |
