Johann W. Bartha

About Johann W. Bartha

Johann W. Bartha, With an exceptional h-index of 33 and a recent h-index of 17 (since 2020), a distinguished researcher at Technische Universität Dresden, specializes in the field of Mikroelektronik, Mikrosystemtechnik, Prozesstechnologie.

His recent articles reflect a diverse array of research interests and contributions to the field:

Model-Based XPS Technique for Characterization of Surface Composition on Nano-Scale SiCOH Sidewalls

Novel Graphene Adjustable-Barrier Transistor with Ultra-High Current Gain

Dynamic deposition system for fabrication of amorphous/crystalline silicon heterojunction solar cells combining linear hot-wire and plasma enhanced chemical vapor deposition …

In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride

Improved graphene-base heterojunction transistor with different collector semiconductors for high-frequency applications

The Doping of Si p‐Field‐Effect Transistor Devices by Gallium Focused Ion Beam Implantation Enabling Flexible Fabrication Routes at Moderate Temperatures

Novel XPS Technique for Fluorocarbon Layer Evaluation on Nano-Scale Sicoh Sidewalls

Investigation of Fluoro-Carbon Layer on Dense Sicoh Formed during CF4 and CF4/C4F6 Based Continuous Wave Plasma Etch

Johann W. Bartha Information

University

Position

Professor für Halbleitertechnik

Citations(all)

4545

Citations(since 2020)

1407

Cited By

3616

hIndex(all)

33

hIndex(since 2020)

17

i10Index(all)

109

i10Index(since 2020)

43

Email

University Profile Page

Google Scholar

Johann W. Bartha Skills & Research Interests

Mikroelektronik

Mikrosystemtechnik

Prozesstechnologie

Top articles of Johann W. Bartha

Title

Journal

Author(s)

Publication Date

Model-Based XPS Technique for Characterization of Surface Composition on Nano-Scale SiCOH Sidewalls

ECS Journal of Solid State Science and Technology

Abhishek Vatsal

Matthias Rudolph

Sebastian Oehler

Varvara Brackmann

Johann Wolfgang Bartha

2023/12/1

Novel Graphene Adjustable-Barrier Transistor with Ultra-High Current Gain

ACS Applied Materials & Interfaces

Carsten Strobel

Carlos A Chavarin

Karola Richter

Martin Knaut

Johanna Reif

...

2022/8/22

Dynamic deposition system for fabrication of amorphous/crystalline silicon heterojunction solar cells combining linear hot-wire and plasma enhanced chemical vapor deposition …

Thin Solid Films

Sebastian Leszczynski

Carsten Strobel

Barbara Leszczynska

Sylva Waurenschk

Sören Röhlecke

...

2022/7/31

In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride

Journal of Vacuum Science & Technology A

Johanna Reif

Martin Knaut

Sebastian Killge

Matthias Albert

Thomas Mikolajick

...

2022/5/1

Improved graphene-base heterojunction transistor with different collector semiconductors for high-frequency applications

Advanced Materials Letters

Carsten Strobel

Carlos Chavarin

Sebastian Leszczynski

Karola Richter

Martin Knaut

...

2022/1/1

The Doping of Si p‐Field‐Effect Transistor Devices by Gallium Focused Ion Beam Implantation Enabling Flexible Fabrication Routes at Moderate Temperatures

physica status solidi (a)

Felix Winkler

Carsten Strobel

Christian Wenzel

Johann W Bartha

2021/1

Novel XPS Technique for Fluorocarbon Layer Evaluation on Nano-Scale Sicoh Sidewalls

Electrochemical Society Meeting Abstracts 240

Abhishek Vatsal

Sebastian Oehler

Matthias Rudolph

Varvara Brackmann

Johann Bartha

2021/10/19

Investigation of Fluoro-Carbon Layer on Dense Sicoh Formed during CF4 and CF4/C4F6 Based Continuous Wave Plasma Etch

Electrochemical Society Meeting Abstracts prime2020

Abhishek Vatsal

Sebastian Oehler

Matthias Rudolph

Varvara Brackmann

Johann W Bartha

2020/11/23

Anisotropic etching of pyramidal silica reliefs with metal masks and hydrofluoric acid

Small

Robert Kirchner

Volker Neumann

Felix Winkler

Carsten Strobel

Sandra Völkel

...

2020/10

Design, fabrication, and comparison of 3D multimode optical interconnects on silicon interposer

Journal of Lightwave Technology

Sujay Charania

Niels Neumann

Sebastian Killge

Felix Winkler

Zaid Al-Husseini

...

2020/7/1

Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers

Journal of Vacuum Science & Technology A

David Dustin Fischer

Martin Knaut

Johanna Reif

Frederik Nehm

Matthias Albert

...

2020/3/1

See List of Professors in Johann W. Bartha University(Technische Universität Dresden)