Il-Kwon Oh
Ajou University
H-index: 23
Asia-South Korea
Top articles of Il-Kwon Oh
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition | The Journal of Chemical Physics | Hwi Yoon Yujin Lee Ga Yeon Lee Seunggi Seo Bo Keun Park | 2024/1/14 |
Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory Devices | Chemistry of Materials | Ae Rim Choi Dong Hyun Lim So-Yeon Shin Hye Joo Kang Dohee Kim | 2024/2/26 |
Molecular Layer Deposition of Organic–Inorganic Hafnium Oxynitride Hybrid Films for Electrochemical Applications | ACS Applied Energy Materials | Hayrensa Ablat Il-Kwon Oh Nathaniel E Richey Solomon T Oyakhire Yufei Yang | 2023/5/15 |
Role of a surface hydroxyl group depending on growth temperature in atomic layer deposition of ternary oxides | Journal of Vacuum Science & Technology A | Sanghun Lee Seunggi Seo Woo-Jae Lee Wontae Noh Se-Hun Kwon | 2023/12/1 |
Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films | Chemistry of Materials | Yujin Lee Kangsik Kim Zonghoon Lee Hong-Sub Lee Han-Bo-Ram Lee | 2023/3/16 |
Area-Selective Atomic Layer Deposition for Resistive Random-Access Memory Devices | ACS Applied Materials & Interfaces | Il-Kwon Oh* Asir Intisar Khan* Shengjun Qin Yujin Lee H-S Philip Wong | 2023/9/1 |
Correction to “Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films” | Chemistry of Materials | Yujin Lee Kangsik Kim Zonghoon Lee Hong-Sub Lee Han-Bo-Ram Lee | 2023/12/29 |
Unconventional Resistivity Scaling in Polycrystalline NbP Thin Films | APS March Meeting Abstracts | Asir Intisar Khan Xiangjin Wu Byoungjun Won Emily Lindgren Christopher Perez | 2023 |
Reaction mechanism and film properties of the atomic layer deposition of ZrO2 thin films with a heteroleptic CpZr (N (CH3) 2) 3 precursor | Applied Surface Science | Ae Rim Choi Seunggi Seo Seiyon Kim Dohee Kim Seung-Wook Ryu | 2023/7/1 |
Understanding Growth Mechanism of Atomic Layer Deposition of Tisiox for Spacer in Double Patterning Process | Electrochemical Society Meeting Abstracts 244 | Sanghun Lee Seunggi Seo Wonate Noh Il-Kwon Oh Hyungjun Kim | 2023/12/22 |
Advanced precursors for selective atomic layer deposition using self-assembled monolayers | 2022/5/5 | ||
Unveiling the effect of superlattice interfaces and intermixing on phase change memory performance | Nano Letters | Asir Intisar Khan Xiangjin Wu Christopher Perez Byoungjun Won Kangsik Kim | 2022/7/25 |
First Demonstration of Ge2Sb2Te5-Based Superlattice Phase Change Memory with Low Reset Current Density (~3 MA/cm2) and Low Resistance Drift (~0.002 at … | Asir Intisar Khan Christopher Perez Xiangjin Wu Byoungjun Won Kangsik Kim | 2022/6/12 | |
New precursors for selective atomic layer deposition of metal oxides with small molecule inhibitors | 2022/5/5 | ||
Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al2O3 with a Series of Al(CH3)xCl3–x and Al(CyH2y+1)3 Precursors | Journal of the American Chemical Society | Il-Kwon Oh Tania E Sandoval Tzu-Ling Liu Nathaniel E Richey Chi Thang Nguyen | 2022/6/7 |
Tuning Molecular Inhibitors and Aluminum Precursors for the Area-Selective Atomic Layer Deposition of Al2O3 | Chemistry of Materials | Josiah Yarbrough Fabian Pieck Daniel Grigjanis Il-Kwon Oh Patrick Maue | 2022/5/10 |
MoS2 doping by atomic layer deposition of high-k dielectrics using alcohol as process oxidants | Applied Surface Science | Whang Je Woo Seunggi Seo Taewook Nam Youngjun Kim Donghyun Kim | 2021/3/1 |
Role of precursor choice on area-selective atomic layer deposition | Chemistry of Materials | Il-Kwon Oh Tania E Sandoval Tzu-Ling Liu Nathaniel E Richey Stacey F Bent | 2021/5/26 |
Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors | Applied Surface Science | Yujin Lee Seunggi Seo Taewook Nam Hyunho Lee Hwi Yoon | 2021/12/1 |
Area-Selective Molecular Layer Deposition of a Silicon Oxycarbide Low-k Dielectric | Chemistry of Materials | Xiaoyun Yu Dara Bobb-Semple Il-Kwon Oh Tzu-Ling Liu Richard G Closser | 2021/2/1 |
Co-Authors
