Hailong Zhou
University of California, Los Angeles
H-index: 32
North America-United States
Top articles of Hailong Zhou
Title | Journal | Author(s) | Publication Date |
---|---|---|---|
In-situ carbon liner for high aspect ratio features | 2024/3/21 | ||
Method of enhancing etching selectivity using a pulsed plasma | 2022/11/8 | ||
Method of etching hardmasks containing high hardness materials | 2020/12/15 |