Greg Hughes

Greg Hughes

Dublin City University

H-index: 40

Europe-Ireland

About Greg Hughes

Greg Hughes, With an exceptional h-index of 40 and a recent h-index of 17 (since 2020), a distinguished researcher at Dublin City University, specializes in the field of Semiconductor device fabrication.

His recent articles reflect a diverse array of research interests and contributions to the field:

Rapid area deactivation for blocking atomic layer deposition processes using polystyrene brush layers

Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition

Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition

Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process

Analysis of Al and Cu salt infiltration into a poly 2-vinylpyridine (P2vP) polymer layer for area selective deposition applications

Precise Definition of a “Monolayer Point” in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration

Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Greg Hughes Information

University

Position

Prof of Physics Ireland

Citations(all)

6010

Citations(since 2020)

1106

Cited By

5218

hIndex(all)

40

hIndex(since 2020)

17

i10Index(all)

115

i10Index(since 2020)

29

Email

University Profile Page

Dublin City University

Google Scholar

View Google Scholar Profile

Greg Hughes Skills & Research Interests

Semiconductor device fabrication

Top articles of Greg Hughes

Title

Journal

Author(s)

Publication Date

Rapid area deactivation for blocking atomic layer deposition processes using polystyrene brush layers

Journal of Materials Chemistry C

Caitlin McFeely

Matthew Snelgrove

Kyle Shiel

Gregory Hughes

Pravind Yadav

...

2022

Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition

Materials Research Express

S O’Donnell

M Snelgrove

K Shiel

C Weiland

G Hughes

...

2022/10/21

Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

Microelectronic Engineering

Matthew Snelgrove

Caitlin McFeely

Greg Hughes

C Weiland

JC Woicik

...

2022/10/15

The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition

Applied Surface Science

A Brady-Boyd

R O'Connor

S Armini

V Selvaraju

M Pasquali

...

2022/6/1

Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process

Materials Advances

Matthew Snelgrove

Caitlin McFeely

Kyle Shiel

Greg Hughes

Pravind Yadav

...

2021

Analysis of Al and Cu salt infiltration into a poly 2-vinylpyridine (P2vP) polymer layer for area selective deposition applications

Journal of Physics D: Applied Physics

Pierre Giovanni Mani-Gonzalez

M Snelgrove

JP Rueff

R Lundy

P Yadav

...

2020/1/3

Precise Definition of a “Monolayer Point” in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration

Langmuir

Ross Lundy

Pravind Yadav

Nadezda Prochukhan

Elsa C Giraud

Tom F O’Mahony

...

2020/10/6

Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Applied Surface Science

Matthew Snelgrove

Caitlin McFeely

Pierre Giovanni Mani-González

K Lahtonen

Ross Lundy

...

2020/6/15

A new method for assessing the recyclability of powders within Powder Bed Fusion process

Materials Characterization

Nima E. Gorji

Prateek Saxena

Martin Corfield

Adam Clare

Jean P. Rueff

...

2020/3

See List of Professors in Greg Hughes University(Dublin City University)

Co-Authors

H-index: 110
Franz Himpsel

Franz Himpsel

University of Wisconsin-Madison

H-index: 55
Eric M Vogel

Eric M Vogel

Georgia Institute of Technology

H-index: 54
Friedrich Schäffler

Friedrich Schäffler

Johannes Kepler Universität Linz

H-index: 48
Christopher Hinkle

Christopher Hinkle

University of Notre Dame

H-index: 44
Stephen McDonnell

Stephen McDonnell

University of Virginia

H-index: 39
pk hurley

pk hurley

University College Cork

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