Eloi Marigó Ferrer
Universidad Autónoma de Barcelona
H-index: 12
Europe-Spain
Top articles of Eloi Marigó Ferrer
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Process Control Monitoring Devices for CMOS-MEMS Monolithic PMUT Technology | Eloi Marigó Siva Kumaaran Mohd Safwan Goon Weng Wong | 2024/1/21 | |
PMUT Array Design for mid-air Haptic feedback | Margo Billen Pieter Gijsenbergh Eloi M Ferrer Mohan S Pandian Xavier Rottenberg | 2022/4/25 | |
Mid-air haptic feedback enabled by aluminum nitride PMUTs | Margo Billen Eloi M Ferrer Mohan S Pandian Xavier Rottenberg Veronique Rochus | 2022/1/9 | |
Manufacturability of highly densed arrays of sc 20% doped aln monolithic pmut | Eloi Marigo Muhammad Nur Azuan Anis Amiera Loh Annie Nor Shazwani | 2021/1/25 | |
Multi-frequency imaging with a CMOS compatible scandium doped aluminum nitride pMUT array | Margo Billen Hang Gao Dries Tabruyn Eloi Marigó Mohan Soundara-Pandian | 2021/1/25 | |
Evaluating film assisted molding packaging for peizoelectric micromachined ultrasonic transducers | Teng Hwang Tan Mohanraj Soundara-Pandian Nor Shazwani Eloi Marigo Regis Arul Raj | 2021/1/25 | |
Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes | Sensors and Actuators A: Physical | Muhammad Zubair Aslam Varun Jeoti Saravanan Karuppanan Mohanraj Soundara Pandian Eloi Marigo Ferrer | 2020/10/1 |
Frequency and Acoustic Performance Tunability for a SiN-AlScN Based PMUT Device | E Marigó M Soundara-Pandian | 2020/7/19 |
