Dr. Prem Pal

About Dr. Prem Pal

Dr. Prem Pal, With an exceptional h-index of 26 and a recent h-index of 16 (since 2020), a distinguished researcher at Indian Institute of Technology Hyderabad, specializes in the field of MEMS, Silicon Micromachining.

His recent articles reflect a diverse array of research interests and contributions to the field:

Study of masking layer behavior towards bulk micromachining of Borofloat glass

Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0.50Sr0.50)TiO3 and Ba(Zr0.15Ti0.85)O3 Bilayer Thin Film Stacks

Optimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films

Wet anisotropic etching characteristics of Si {111} in NaOH-based solution for silicon bulk micromachining

Microactuators, Microsensors and Micromechanisms: MAMM 2022

Etching Characteristics of Si {110} in NaOH Based Solution

Wet bulk micromachining characteristics of Si {110} in NaOH-based solution

Deep Grooves in Borofloat Glass by Wet Bulk Micromachining

Dr. Prem Pal Information

University

Position

Professor Dept. of Physics India

Citations(all)

2193

Citations(since 2020)

975

Cited By

1613

hIndex(all)

26

hIndex(since 2020)

16

i10Index(all)

57

i10Index(since 2020)

35

Email

University Profile Page

Indian Institute of Technology Hyderabad

Google Scholar

View Google Scholar Profile

Dr. Prem Pal Skills & Research Interests

MEMS

Silicon Micromachining

Top articles of Dr. Prem Pal

Title

Journal

Author(s)

Publication Date

Study of masking layer behavior towards bulk micromachining of Borofloat glass

Materials Today: Proceedings

Adarsh Nigam

Vishal Sahu

P Krishna Menon

Prem Pal

2023/1/1

Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0.50Sr0.50)TiO3 and Ba(Zr0.15Ti0.85)O3 Bilayer Thin Film Stacks

Journal of Electronic Materials

MLV Mahesh

Prem Pal

VV Bhanu Prasad

AR James

2022/2/1

Optimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films

MLV Mahesh

Prem Pal

VV Bhanuprasad

AR James

2022/11/21

Wet anisotropic etching characteristics of Si {111} in NaOH-based solution for silicon bulk micromachining

Micro and Nano Systems Letters

S Purohit

V Swarnalatha

AK Pandey

P Pal

2022/12/1

Microactuators, Microsensors and Micromechanisms: MAMM 2022

Ashok Kumar Pandey

Prem Pal

Lena Zentner

2022/11/20

Etching Characteristics of Si {110} in NaOH Based Solution

Soumya Purohit

Veerla Swarnalatha

Prem Pal

2022/11/21

Wet bulk micromachining characteristics of Si {110} in NaOH-based solution

Journal of Micromechanics and Microengineering

S Purohit

V Swarnalatha

Ashok Kumar Pandey

RK Sharma

Prem Pal

2022/11/2

Deep Grooves in Borofloat Glass by Wet Bulk Micromachining

Adarsh Nigam

Swarnalatha Veerla

Prem Pal

2022/11/21

Enhanced etching characteristics of Si {100} in NaOH-based two-component solution

Micro and Nano Systems Letters

V Swarnalatha

S Purohit

Prem Pal

RK Sharma

2022/8/1

Effect of IPA on Micromachining Characteristics of Silicon in KOH-Based Solution

Avvaru Venkata Narasimha Rao

Prem Pal

2022/11/21

Fatigue and leakage current characteristics of lead free bilayer thin film structures

Ceramics International

MLV Mahesh

Prem Pal

VV Bhanu Prasad

AR James

2022/4/1

Design and fabrication of a triple band microstrip antenna for WLAN, satellite tv and radar applications

Electromagnetics

Prem P Singh

Sudhir K Sharma

2021

High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

Prem Pal

Veerla Swarnalatha

Avvaru Venkata Narasimha Rao

Ashok Kumar Pandey

Hiroshi Tanaka

...

2021/12

Comparative study of perforated microcantilevers for MEMS applications

Soumya Purohit

Prem Pal

Ashok Kumar Pandey

2021/8/25

A Facile Way of Surface Texturing of Si {100} using KOH for Silicon Solar Cells

Arti Gupta

Prem Pal

Chandra Shekhar Sharma

2021/8/25

Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

Microsystem Technologies

Arnab Biswas

Vishal S Pawar

P Krishna Menon

Prem Pal

Ashok Kumar Pandey

2021/7

Systematic study of the etching characteristics of Si {111} in modified TMAH

Micro & Nano Letters

Veerla Swarnalatha

Prem Pal

Ashok Kumar Pandey

Avvaru Venkata Narasimha Rao

Yan Xing

...

2020/1

Effect of Etching Temperature on the Surface Texturing of Si {100} in an Extremely Low Concentration Tmah for Minimized Reflectivity

Electrochemical Society Meeting Abstracts 237

Arti Gupta

Prem Pal

Chandra Shekhar Sharma

2020/5/1

High speed etching of silicon in KOH + NH2 OH solution at lower temperatures for the fabrication of through holes in silicon wafer

Micro & Nano Letters

Parappurath Krishna Menon

Avvaru Venkata Narasimha Rao

Airpula Linga Murthy

Ashok Kumar Pandey

Prem Pal

2020/5

Pyramid textured Si {100} surface with low reflectivity in CMOS compatible solution

Micro & Nano Letters

Arti Gupta

Prem Pal

Chandra Shekhar Sharma

2020/12

See List of Professors in Dr. Prem Pal University(Indian Institute of Technology Hyderabad)

Co-Authors

H-index: 27
Saket Asthana, Ph.D., FRSC

Saket Asthana, Ph.D., FRSC

Indian Institute of Technology Hyderabad

H-index: 25
Miguel Angel Gosalvez

Miguel Angel Gosalvez

Universidad del País Vasco

H-index: 20
Ashok Kumar Pandey

Ashok Kumar Pandey

Indian Institute of Technology Hyderabad

H-index: 11
Akarapu Ashok, PhD

Akarapu Ashok, PhD

Indian Institute of Technology Hyderabad

H-index: 6
Yuan Li

Yuan Li

Southeast University

H-index: 6
Subhomoy Haldar

Subhomoy Haldar

Lunds Universitet

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