Bo Cui

Bo Cui

University of Waterloo

H-index: 30

North America-Canada

About Bo Cui

Bo Cui, With an exceptional h-index of 30 and a recent h-index of 20 (since 2020), a distinguished researcher at University of Waterloo, specializes in the field of Nanofabrication, MEMS, electron beam and nanoimprint lithography.

His recent articles reflect a diverse array of research interests and contributions to the field:

Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications

Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication

Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

Fabrication of slanted gratings by using glancing angle deposition

Edge lithography based on aluminum dry etching

Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch

High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures

Cryogenic etching of positively tapered silicon pillars with controllable profiles

Bo Cui Information

University

Position

___

Citations(all)

3795

Citations(since 2020)

1416

Cited By

2904

hIndex(all)

30

hIndex(since 2020)

20

i10Index(all)

77

i10Index(since 2020)

43

Email

University Profile Page

Google Scholar

Bo Cui Skills & Research Interests

Nanofabrication

MEMS

electron beam and nanoimprint lithography

Top articles of Bo Cui

Title

Journal

Author(s)

Publication Date

Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications

Journal of Vacuum Science & Technology B

Yunchenxin Wang

Aixi Pan

Xiaoli Zhu

Bo Cui

2024/1/1

Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication

Journal of Vacuum Science & Technology B

Xiaoli Zhu

Zihao Wang

Chenxu Zhu

Jiashi Shen

Babak Shokouhi

...

2024/5/1

Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

IEEE Transactions on Semiconductor Manufacturing

Aixi Pan

Chenxu Zhu

Zheng Yan

Xiaoli Zhu

Zhongyi Liu

...

2024/3/4

Fabrication of slanted gratings by using glancing angle deposition

Journal of Vacuum Science & Technology B

Hongwen Wu

Aixi Pan

Chenxu Zhu

Bo Cui

2024/3/1

Edge lithography based on aluminum dry etching

Micro and Nano Engineering

Chenxu Zhu

Aixi Pan

Xiaoli Zhu

Shuo Zheng

Bo Cui

2024/3/1

Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch

Journal of Vacuum Science & Technology B

Renqiang Kang

Aixi Pan

Bo Cui

2024/5/1

High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures

Micro and Nano Engineering

Wenhan Hu

Zihao Wang

Aixi Pan

Bo Cui

2024/3/1

Cryogenic etching of positively tapered silicon pillars with controllable profiles

Journal of Vacuum Science & Technology B

Xiaoli Zhu

Aixi Pan

Babak Shokouhi

Bo Cui

2024/5/1

Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays

Journal of Vacuum Science & Technology B

Aixi Pan

Medhat Samaan

Zheng Yan

Wenhan Hu

Bo Cui

2023/3/1

Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask

Microelectronic Engineering

Medhat Samaan

Huseyin Ekinci

Ripon Dey

Xiaoli Zhu

Dmitry Pushin

...

2023/1/1

Improving adhesion quality of SU-8 to gold thin film for absorption grating fabrication in X-ray phase-contrast imaging

Abdollah Pil-Ali

Mohammad Soltani

Sahar Adnani

Muhammed Kayaharman

Mahla Poudineh

...

2022/4/4

Electrophoretic display assemblies and devices and methods of manufacture thereof

2022/5/26

A novel multi-layer grating structure for X-ray phase-contrast imaging

Abdollah Pil-Ali

Mohammad Soltani

Sahar Adnani

Bo Cui

Karim Salaudin Karim

2022/4/4

Effect of annealing on the structural, optical and surface properties of chromium oxide (Cr2O3) thin films deposited by e-beam evaporation for plasma etching applications

Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy

BP Singh

RA Singh

2016/1/5

Constructing 1D/2D heterojunction photocatalyst from FeSe2 nanorods and MoSe2 nanoplates with high photocatalytic and photoelectrochemical performance

International Journal of Energy Research

Zhe Kong

Jun Zhang

Hongbo Wang

Bo Cui

Jinghui Zeng

...

2020/2

Synthesis of New Nitride Alloys with Mg by Plasma‐Assisted Molecular Beam Epitaxy

physica status solidi (b)

Iulian Gherasoiu

Kin Man Yu

Huseyin Ekinci

Bo Cui

Michael Hawkridge

...

2020/9

Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication

Journal of Vacuum Science & Technology B

Ripon Kumar Dey

Huseyin Ekinci

Bo Cui

2020/1/1

Dry etching strategy of spin-transfer-torque magnetic random access memory: A review

Rabiul Islam

Bo Cui

Guo-Xing Miao

2020/9/1

Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars

Journal of Vacuum Science & Technology B

Ferhat Aydinoglu

Aixi Pan

Chenxu Zhu

Bo Cui

2020/1/1

The role of oxygen on anisotropy in chromium oxide hard mask etching for sub-micron fabrication

IEEE Transactions on Nanotechnology

Huseyin Ekinci

Navid MS Jahed

Mohammad Soltani

Bo Cui

2020/11/17

See List of Professors in Bo Cui University(University of Waterloo)

Co-Authors

academic-engine