Alexey Kovalgin
Universiteit Twente
H-index: 22
Europe-Netherlands
Top articles of Alexey Kovalgin
Title | Journal | Author(s) | Publication Date |
|---|---|---|---|
Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing | Separations | Michiel Nijboer Asif Jan Mingliang Chen Kevin Batenburg Julia Peper | 2024/1/9 |
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials | Mingliang Chen Michiel Pieter Nijboer Alexey Y Kovalgin Arian Nijmeijer Fred Roozeboom | 2023 | |
Low-resistivity molybdenum obtained by atomic layer deposition | Journal of Vacuum Science & Technology A | Kees van der Zouw Bernhard Y van der Wel Antonius AI Aarnink Rob AM Wolters Dirk J Gravesteijn | 2023/9/1 |
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride | The Journal of Physical Chemistry C | Bernhard Y van der Wel Kees van der Zouw Antonius AI Aarnink Alexey Y Kovalgin | 2023/8/17 |
Method of forming a device structure using selective deposition of gallium nitride and system for same | 2023/5/23 | ||
Thin-film (Al) BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition | AIP advances | Ramazan O Apaydin Antonius AI Aarnink Dirk J Gravesteijn Michel P De Jong Alexey Y Kovalgin | 2023/2/1 |
Reactor and related methods | 2022/5/12 | ||
Li intercalation into multilayer graphene with controlled defect densities | Carbon Trends | Michal W Ochapski Derya Ataç Johnny GM Sanderink Alexey Y Kovalgin Michel P de Jong | 2021/7/1 |
Study of the phase nature of boron-and nitrogen-containing films by optical and photoelectron spectroscopy | Journal of Vacuum Science & Technology B | Arnoud J Onnink Ramazan O Apaydin Antonius AI Aarnink Michel P de Jong Dirk J Gravesteijn | 2020/7/1 |
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia | Journal of Vacuum Science & Technology A | Ramazan O Apaydin Arnoud J Onnink Xingyu Liu Antonius AI Aarnink Michel P de Jong | 2020/5/1 |
Conduction and electric field effect in ultra-thin tungsten films | IEEE Transactions on Semiconductor Manufacturing | Kees van der Zouw Antonius AI Aarnink Jurriaan Schmitz Alexey Y Kovalgin | 2020/2/27 |
Selective deposition of tungsten | 2020/10/29 | ||
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films | Thin Solid Films | Derya Ataç Johnny GM Sanderink Sachin Kinge Dirk J Gravesteijn Alexey Y Kovalgin | 2020/9/1 |
