Tim Houben

IndustReal: A Dataset for Procedure Step Recognition Handling Execution Errors in Egocentric Videos in an Industrial-Like Setting

Proceedings of the Workshop on 3D Geometry Generation for Scientific Computing

Probing EUV resist defect detectability using a SEM simulation framework

A multi-wafer case study for 3D geometry prediction of FinFET-like structures with top-down SEM imaging

Training procedure for scanning electron microscope 3D surface reconstruction using unsupervised domain adaptation with simulated data

Depth estimation from SEM images using deep learning and angular data diversity

Depth estimation from a single SEM image using pixel-wise fine-tuning with multimodal data

Apparatus and method for determining three dimensional data based on an image of a patterned substrate